Semiconductor Materials and Process Technology Handbook (Vlsi and Ultra Large Scale Integration) 0815511507, 9780815511502, 9780815518969
This handbook is a broad review of semiconductor materials and process technology, with emphasis on very large-scale int
414 133 241KB
English Pages 688 [691] Year 1989
Table of contents :
Semiconductor MaterialsandProcess Technology......Page 4
Copyright......Page 5
Contributors......Page 6
Contents......Page 8
Introduction......Page 16
1 Silicon Materials Technology......Page 23
2 The Thermal Oxidation of Siliconand Other Semiconductor Materials......Page 61
3 Chemical Vapor Deposition of Siliconand Its Compounds......Page 95
4 Chemical Etching and SliceCleanup of Silicon......Page 141
5 Plasma Processing:Mechanisms and Applications......Page 206
6 Physical Vapor Deposition......Page 344
7 Diffusion and Ion Implantation in Silicon......Page 470
8 Microlithography for VLSI......Page 556
9 Metallization for VLSI Interconnectand Packaging......Page 590
10 Characterization of Semiconductor Materials......Page 625
Index......Page 684
Semiconductor MaterialsandProcess Technology......Page 4
Copyright......Page 5
Contributors......Page 6
Contents......Page 8
Introduction......Page 16
1 Silicon Materials Technology......Page 23
2 The Thermal Oxidation of Siliconand Other Semiconductor Materials......Page 61
3 Chemical Vapor Deposition of Siliconand Its Compounds......Page 95
4 Chemical Etching and SliceCleanup of Silicon......Page 141
5 Plasma Processing:Mechanisms and Applications......Page 206
6 Physical Vapor Deposition......Page 344
7 Diffusion and Ion Implantation in Silicon......Page 470
8 Microlithography for VLSI......Page 556
9 Metallization for VLSI Interconnectand Packaging......Page 590
10 Characterization of Semiconductor Materials......Page 625
Index......Page 684
![VLSI-SoC: New Technology Enabler: 27th IFIP WG 10.5/IEEE International Conference on Very Large Scale Integration, VLSI-SoC 2019, Cusco, Peru, October 6–9, 2019, Revised and Extended Selected Papers [1st ed.]
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