Photonic MEMS Devices: Design, Fabrication and Control (Optical Science and Engineering) [1 ed.] 1420045687, 9781420045680

Photonic MEMS devices represent the next major breakthrough in the silicon revolution. While many quality resources exis

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English Pages 483 [504] Year 2008

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Photonic MEMS Devices: Design, Fabrication and Control (Optical Science and Engineering) [1 ed.]
 1420045687, 9781420045680

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