Handbook of plasma processing technology: fundamentals, etching, deposition, and surface interactions 0815512201, 9780815512202, 9780815517634

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 con

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English Pages 535 Year 1990

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Handbook of plasma processing technology: fundamentals, etching, deposition, and surface interactions
 0815512201, 9780815512202, 9780815517634

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