VLSI Technology: Fundamentals and Applications [1 ed.] 3540125582, 9783540125587


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English Pages 450 [465] Year 1986

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Table of contents :
Front Matter....Pages I-XIV
Introduction....Pages 1-7
Electron Beam Lithography....Pages 8-120
Pattern Replication Technology....Pages 121-171
Mask Inspection Technology....Pages 172-192
Crystal Technology....Pages 193-270
Process Technology....Pages 271-325
Fundamentals of Test and Evaluation....Pages 326-349
Basic Device Technology....Pages 350-426
Back Matter....Pages 427-450

VLSI Technology: Fundamentals and Applications [1 ed.]
 3540125582, 9783540125587

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