Chemistry of Atomic Layer Deposition 9783110712537, 9783110712513

This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor desig

224 16 3MB

English Pages 113 Year 2021

Report DMCA / Copyright

DOWNLOAD EPUB FILE

Chemistry of Atomic Layer Deposition
 9783110712537, 9783110712513

  • 0 0 0
  • Like this paper and download? You can publish your own PDF file online for free in a few minutes! Sign Up
Recommend Papers