Beam Effects, Surface Topography, and Depth Profiling in Surface Analysis [1 ed.] 0306458969, 9780306458965, 9780306469145
Many books are available that detail the basic principles of the different methods of surface characterization. On the o
351 75 6MB
English Pages 430 [451] Year 2002
Table of contents :
Photon Beam Damage and Charging at Solid Surfaces....Pages 1-37
Electron Beam Damage at Solid Surfaces....Pages 39-96
Ion Beam Bombardment Effects on Solid Surfaces at Energies Used for Sputter Depth Profiling....Pages 97-274
Characterization of Surface Topography....Pages 275-354
Depth Profiling Using Sputtering Methods....Pages 355-419
Photon Beam Damage and Charging at Solid Surfaces....Pages 1-37
Electron Beam Damage at Solid Surfaces....Pages 39-96
Ion Beam Bombardment Effects on Solid Surfaces at Energies Used for Sputter Depth Profiling....Pages 97-274
Characterization of Surface Topography....Pages 275-354
Depth Profiling Using Sputtering Methods....Pages 355-419
![Beam Effects, Surface Topography, and Depth Profiling in Surface Analysis [1 ed.]
0306458969, 9780306458965, 9780306469145](https://ebin.pub/img/200x200/beam-effects-surface-topography-and-depth-profiling-in-surface-analysis-1nbsped-0306458969-9780306458965-9780306469145.jpg)
- Author / Uploaded
- John H. Thomas III (auth.)
- Alvin W. Czanderna
- Theodore E. Madey
- Cedric J. Powell (eds.)
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